HOMOEPITAXIAL GROWTH OF ALPHA-SIC THIN FILMS AND SEMICONDUCTOR DEVICES FABRICATED THEREON

摘要

HOMOEPITAZIAL GROWTH OF ALPHA-SIC THIN FILMSAND SEMICONDUCTOR DEVICES FABRICATED THEREONAbstract of the DisclosureDevice quality monocrystalline Alpha-Sic thinfilms are epitaxially grown by chemical vapor depositionon Alpha-SiC [0001] substrates prepared off axis.FILM.1 .25(8B) RSF