Light ozone asher, light ashing method, and manufacturing method of semiconductor device

摘要

A light/ozone asher includes a process chamber having a sample stage for supporting a sample processed with active oxygen generated by irradiating ozone with UV rays while not irradiating the sample with UV rays. Since the sample is not irradiated with UV rays when an organic substance on the sample surface is removed, an organic substance (scum) left by removal of parts of the organic substance on the sample is removed without destroying the remaining pattern of organic substance.