TEMPERATURE SENSITIVE RESISTANCE MATERIAL AND MANUFACTURING METHOD FOR THE SAME, AND INFRARED SENSOR USING THE TEMPERATURE SENSITIVE RESISTANCE MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a temperature sensitive resistance material, having a substantially constant resistance change rate over a wide temperature range which is substantially free of temperature management, has a small specific resistance, and a large absolute value of a resistance temperature coefficient in the temperature range of -3.5%/°C or lower and a method for manufacturing the same, and to provide an infrared sensor which uses the temperature sensitive resistance material. ;SOLUTION: A titanium oxide film is obtained, by conducting ion assisting together with sputtering in the case of sputtering, by using titanium or titanium oxide (target). Sputtering is preferably conducted in an atmosphere containing oxygen. It is more preferred to satisfy the relation a/25≤ba, where a is electric power to be applied to a main gun, and a b is a power to be applied to an assisting gun. The resistance temperature coefficient of the titanium oxide at 25°C obtained by using a value of 25 to 70°C is about -3.56%/°C of the large absolute value and is maintained at a fixed value in the temperature range.;COPYRIGHT: (C)2001,JPO