ROAD PORT OF SEMICONDUCTOR FABRICATION APPARATUS TO PREVENT OVER-DRIVING OF LATCH KEY

摘要

PURPOSE: A road port for FOUP(Front Opening Unified Pod) is provided to prevent over-driving of a latch key by sensing overload of a motor to generate interlock. CONSTITUTION: A road port includes a latch key inserted in a latch hole located at a door of a wafer transport box, a driving motor(138) for driving the latch key, a measurement part(144) for measuring the current of the driving motor, and a controller(146). If the measured value from the measurement part is exceeded to a predetermined reference value, the controller generates interlock.