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METHOD AND APPARATUS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR

机译:用于规划半导体接触器的方法和装置

摘要

A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
机译:探针卡组件的平面器。平坦化器包括从探针卡组件中的基板延伸的第一控制构件。第一控制构件延伸穿过探针卡组件中的至少一个基板,并且可从探针卡组件中的外部基板的暴露侧进入。致动第一控制构件导致连接至第一控制构件的基板的挠曲。

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