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METHOD AND APPARATUS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR
METHOD AND APPARATUS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR
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机译:用于规划半导体接触器的方法和装置
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摘要
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
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