METHOD AND APPARATUS FOR PLANARIZING SEMICONDUCTOR CONTACTOR

摘要

PROBLEM TO BE SOLVED: To provide a planarizing apparatus for a probe card assembly.;SOLUTION: The probe card assembly 200 is composed of an elastic contact structure 211, a space exchanger 210, a frame 212, an interposer 230, elastic contact structures 229 and 231, a frame 218, a printed wiring substrate 220, a drive plate 222, a stud 238, an extension stud 240, and a screw 224.;COPYRIGHT: (C)2005,JPO&NCIPI