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Device for testing an active inter-region device isolation characteristics of the semiconductor element

机译:用于测试半导体元件的有源区域间设备隔离特性的设备

摘要

PURPOSE: A testing device is provided to enable the measurement of an isolation property between active regions of a semiconductor device. CONSTITUTION: A great number of Z-shaped active regions are formed on a semiconductor substrate, each being arranged by turns in reverse shape. In a first row of the active regions, a first active region(35a) and a third active region(35c) each has two bit line contacts(37a,37c) commonly connected to a bit line(39), whereas a second active region(35b) of a second row interposed between the first and third active regions(35a,35c) at a first end has two storage electrode contacts(37b) and a bit line contact. The one storage electrode contact(37b) formed at the first end of the second active region(35b) is disposed between the both bit line contacts(37a,37c) respectively formed at one end of the first and third active regions(35a,35c). Accordingly, the three active regions(35a,35b,35c) constitute a parasitic field transistor for measuring an isolation property of a device. Besides, the bit line contact formed at a second end of the second active region(35b) is connected to another bit line.
机译:目的:提供一种测试装置,以能够测量半导体器件有源区之间的隔离特性。构成:在半导体衬底上形成了大量的Z形有源区,每个有源区以反向形状依次排列。在有源区的第一行中,第一有源区(35a)和第三有源区(35c)每个具有两个位线触点(37a,37c),它们共同连接到位线(39),而第二有源区在第一端的第一和第三有源区(35a,35c)之间插入的第二行的(35b)具有两个存储电极触点(37b)和位线触点。形成在第二有源区域(35b)的第一端的一个存储电极触点(37b)设置在分别形成在第一有源区域(35a)和第三有源区域(35c)的一端的两个位线接触(37a,37c)之间。 )。因此,三个有源区(35a,35b,35c)构成用于测量器件的隔离特性的寄生场晶体管。此外,形成在第二有源区(35b)的第二端的位线接触连接到另一位线。

著录项

  • 公开/公告号KR100506049B1

    专利类型

  • 公开/公告日2005-09-26

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR19980059558

  • 发明设计人 이병렬;

    申请日1998-12-28

  • 分类号H01L21/76;

  • 国家 KR

  • 入库时间 2022-08-21 22:03:33

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