MICRO ELECTROMECHANICAL DEVICE, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING MICRO ELECTROMECHANICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce scattered light in a micro electromechanical device for optics.;SOLUTION: The micro electromechanical device 1 is so composed to have an optical element 4 having a supporting part 6 connected to a substrate 2 and a modulating part 5 facing the substrate across the supporting part 6, wherein the optical element 4 has a reflecting film 52 at least in the modulating part 5 and the reflecting films 52 and 62 are partially covered by an anti-reflection film 63.;COPYRIGHT: (C)2007,JPO&INPIT