METHOD FOR MANUFACTURING ELECTROMECHANICAL CONVERSION FILM, METHOD FOR MANUFACTURING ELECTROMECHANICAL CONVERSION DEVICE, LIQUID DISCHARGE HEAD, INK-JET PRINTER, DEFLECTION MIRROR, ACCELERATION SENSOR, HDD HEAD FINE CONTROLLER, FERROELECTRIC MEMORY DEVICE, ANGULAR RATE SENSOR, MICROPUMP AND MICROVALVE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an electromechanical conversion film which is not restricted by a substrate material, and is superior in productivity.SOLUTION: A method for manufacturing an electromechanical conversion film comprises: a coating step for forming a patterned sol-gel film by spraying a sol-gel liquid on part of the surface of a first electrode provided on a substrate by an ink jet technique; a drying step for drying the sol-gel film; a thermal decomposition step for thermally decomposing the sol-gel film by irradiating the sol-gel film with flash lamp radiation; and a crystallization step for causing the crystallization of the sol-gel film by irradiating the sol-gel film with flash lamp radiation.