METHOD OF MANUFACTURING ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION FILM GROUP, METHOD OF MANUFACTURING ELECTROMECHANICAL CONVERSION ELEMENT, ELECTROMECHANICAL CONVERSION ELEMENT, ELECTROMECHANICAL CONVERSION ELEMENT GROUP, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND IMAGE FORMING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a patterned electromechanical conversion film having a desired film thickness.;SOLUTION: In the method of manufacturing the electromechanical conversion film, the electromechanical conversion film is formed by a sol-gel method through the processes of: performing partial surface modification on a first electrode; partially applying a sol-gel liquid on the first electrode by an inkjet system; drying, thermally decomposing, and crystallizing the partially applied sol-gel liquid; and obtaining the desired film thickness by repeating the process of partially applying the sol-gel liquid by the inkjet system and the process of drying, thermally decomposing, and crystallizing the partially applied sol-gel liquid. In the process of partially applying the sol-gel liquid on the first electrode by the inkjet system, the electromechanical film is so patterned that adjacent dots in impinging of the application of the sol-gel liquid of a first layer are arranged overlapping with each other and an application amount of the sol-gel liquid of second and succeeding layers is made less than an application amount of the sol-gel liquid of the first layer so that adjacent dots in impinging are arranged not overlapping with each other.;COPYRIGHT: (C)2011,JPO&INPIT