SURFACE SHAPE MEASURING APPARATUS AND METHOD FOR DETECTING ANOMALY OF STYLUS LOAD

摘要

PROBLEM TO BE SOLVED: To prevent a stylus and a pickup from being broken due to excessive loads acting on the stylus by detecting anomalies of loads acting the stylus in a surface shape measuring apparatus having the stylus which comes into contact with surfaces of objects to be measured.;SOLUTION: The surface shape measuring apparatus 1 for measuring the surface shape of an object to be measured W by relatively moving the stylus 11 as keeping the stylus 11 in contact with a surface of the object to be measured W, detecting displacements of the stylus 11 caused by irregularities of the surface of the object to be measured W, and creating displacement signals, includes a stylus-load-anomaly detection part 62 for detecting anomalies in changes in the displacement signals as anomalies in loads actin on the stylus 11.;COPYRIGHT: (C)2008,JPO&INPIT