METHOD FOR MEASURING SURFACE POTENTIAL, METHOD FOR MEASURING SURFACE POTENTIAL AND SURFACE SHAPE, APPARATUS FOR MEASURING SURFACE POTENTIAL, AND, APPARATUS FOR MEASURING SURFACE POTENTIAL AND SURFACE SHAPE

摘要

PURPOSE: To measure the surface potential of an object with high space resolution. ;CONSTITUTION: A surface potential sensor 21 which has a material 24 with an electrooptic effect disposed between a dielectric reflecting film 23 and a transparent conductive film 22 is used. A DC bias potential and an alternating potential are applied to the transparent conductive film 22, and the light from a light source 31 is brought into the surface potential sensor 21. The change in the polarization state of the projecting light is converted to a light intensity signal by an analyzer 30 and synchronously detected with a frequency of the alternating potential. The DC bias potential is feed-back controlled by the detected signal and detected, whereby a surface potential signal is obtained.;COPYRIGHT: (C)1996,JPO