Spatial measuring error inspecting apparatus for optical three-dimensional shape measuring apparatus, method for detecting spatial measurement error, correction method, optical three-dimensional shape measuring apparatus, spatial measurement error calibration method of optical three-dimensional shape measuring apparatus, and planar standard for inspection of optical performance of optical three-dimensional shape measuring apparatus

摘要

Problem to be solved: to provide a spatial measurement error inspection device and a spatial measurement error detection method of an optical three-dimensional shape measuring apparatus for measuring a three-dimensional shape of an object in non-contact by scanning a measurement light irradiated from an optical comb distance meter to a measurement object according to JIS B .A plurality of test spheres 120 are arranged in two dimensions with a substrateThe above inspection ballIt is processed into a sphere with a predetermined diameter.A steel ball having a threaded hole 121 having a depth shorter than the diameter ofTitanium nitride film is deposited on the surface.The above substrateTwo or more through holes 111 through which screws 130 screwed into the threaded holes are formed are formed.Chamfering 112 is applied to the surface of the through-hole in contact with the test ball.It is screwed and fixed from the back side of the substrate in contact with the chamfered portion of the plateEach central coordinate of the plurality of inspection spheresDistance between spheresAt least one of the sphericity or diameter is known.Selection diagram