From the seed crystal supporting structure and the silicon monocrystal pick-up mannered null large-diameter part which

摘要

PROBLEM TO BE SOLVED: To provide a seed crystal supporting device preventing the damage of the seed crystal by dispersing the stress applied on the support part of a single crystal and capable of easily setting the central axis of the seed crystal.;SOLUTION: This seed crystal supporting device is as follows. An upper holder 1 and a lower holder 2 are roughly cylindrical in shape, and can be fitted by screw connection. The lower holder 2 has a decreased diameter on one end, so that a seed crystal 3 can be inserted in it and makes surface-contact with the tapered part 5 of the seed crystal. On the other end of the lower holder 2, a flange part 2a is formed. The upper part of the upper holder 1 is tapered down to the top and has a connecting part 1a to connect with a wire 7 for pulling the crystal. The upper holder 1 has a hood 1b having a truncated chevron shape cross section and is connected to the connecting part 1a, and the inner wall of the hood 1b has a slanting surface. Near the edge of the hood 1b, a screw 1c is formed. This seed crystal holding device is equipped with a holding ring 6 to guide the central axis of the seed crystal vertically. The holding ring 6, through which the larger diameter part of the seed crystal is inserted, is put on the flange part 2a of the lower holder 2 and has a roughly conical shape.;COPYRIGHT: (C)2006,JPO&NCIPI