Rotary balance adjustment manner of the pull head of the monocrystal pick-up device and the monocrystal pick-up mannered null balance which uses

摘要

PROBLEM TO BE SOLVED: To provide a method for regulating the rotation balance of a pull head of a single crystal pulling apparatus, by which the regulation of the balance of the pull head can be performed objectively with precision, and the single crystal free of warps or dislocations can be pulled.;SOLUTION: The method for regulating the rotation balance of the pull head of the single crystal pulling apparatus comprises mounting a pull head not subjected to the balance regulation on an inclined table having an inclined face through a bearing unit, then affirming that the heavy side of the pull head faces downward, and regulating the rotation balance by moving a balance weight movably provided on a substrate of the pull head.;COPYRIGHT: (C)2005,JPO&NCIPI