SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH WAFER TRANSFER ROBOT AND TEACHING METHOD, AND AUTOMATIC TEACHING APPARATUS AND METHOD THEREOF

摘要

The invention of semiconductor manufacturing equipment, and his teaching methods to a substrate transfer robot, and his automatic teaching device and a method. Semiconductor manufacturing equipment includes a processing unit that is arranged in parallel with the direction of movement of the substrate transfer robot, includes at least one processing unit is arranged inclined at an angle to the direction of movement of the substrate transfer robot. Substrate transfer robot moves right and left in parallel and processing units arranged in parallel to the teaching setting of the processing unit is arranged obliquely. Therefore, the automatic teaching apparatus for teaching, setting of the processing unit is arranged obliquely, converting the rectangular coordinate system by the vision camera in the coordinate system including a certain angle, and using the transformed coordinate system is set teaching the robot arm. According to the present invention, may be inclined to facilitate the teaching of the robot arm set for at least one processing unit is disposed.