SEMICONDUCTOR MANUFAFTURING EQUIPMENTS WITH AUTOMATIC TEACHING APPARATUS OF WAFER TRANSFER ROBOT AND METHOD FOR TEACHING OF THE SAME

摘要

The present invention provides a substrate manufacturing facility. A substrate manufacturing apparatus according to the present invention includes a processing unit having a susceptor on which a substrate is seated; A substrate transfer device having an end effector and transferring the substrate to the susceptor of the processing unit; A teaching jig mounted on the end effector and acquiring image data of targets preset in the susceptor; And a controller configured to control the automatic teaching of the substrate transfer apparatus by receiving the image data from the teaching jig and detecting the positions of the targets from the image data.