SEMICONDUCTOR MANUFAFTURING EQUIPMENTS WITH AUTOMATIC TEACHING APPARATUS OF WAFER TRANSFER ROBOT AND METHOD FOR TEACHING OF THE SAME

摘要

TECHNICAL FIELD This invention relates to the semiconductor manufacturing equipment provided with the automatic teaching apparatus of a substrate transfer robot, and its teaching method. The semiconductor manufacturing facility includes a processing unit disposed in parallel with the moving direction of the substrate transfer robot, and at least one processing unit disposed inclined at an angle to the moving direction of the substrate transfer robot. The substrate transfer robot moves left and right in parallel with the processing units arranged in parallel even when the teaching setting of the processing units arranged inclined. Therefore, the automatic teaching apparatus acquires the coordinate data of the hole with respect to the center position of the plate by acquiring the image data with the vision camera for setting the teaching of the processing unit arranged obliquely, and moves the robot arm to approach the coordinate value of the hole within an error range. Teaching and setting the robot arm by moving left and right in the axial direction and at an angle to the central axis. According to the present invention, teaching setting of the robot arm to at least one processing unit arranged obliquely is possible.;Semiconductor manufacturing equipment, automatic teaching device, vision camera, coordinate tracking, processing unit