INDIUM TIN OXIDE SINTERED BODY AND INDIUM TIN OXIDE TARGET

摘要

An indium tin oxide sintered body and a target thereof are provided to increase density of the indium tin oxide target by increasing sinterability of the indium tin oxide sintered body, and to reduce manufacturing cost with tin oxide of high concentration. An indium tin oxide sintered body includes indium oxide powder, tin oxide powder and metal-containing compound powder. A mass ratio of the tin oxide powder is 25~50wt%. The metal-containing compound powder is selected from a group consisting of calcium oxide, magnesium oxide, zirconium oxide yttrium oxide lineage ceramics, titanium oxide, calcium carbonate, magnesium carbonate, tartaric acid calcium, tartaric acid magnesium, titanate tin or indium acid calcium powder. A rate of a metal atom of the metal-containing compound powder is 0.001~10at%.