SINTERING FURNACE FOR MANUFACTURING AN INDIUM TIN OXIDE TARGET CAPABLE OF PREVENTING CRACKS FROM GENERATING IN AN INDIUM TIN OXIDE SINTERED BODY

摘要

PURPOSE: A sintering furnace for manufacturing an indium tin oxide(ITO) target is provided to obtain an ITO sintered body by maintaining positive pressures in a sintering space.;CONSTITUTION: A sintering furnace(100) for manufacturing an ITO target includes a main body(110), an exhausting unit(120), and a controller. A sintering space is arranged in the main body. The exhausting unit is installed on the upper side of the main body. The controller controls the exhausting unit according to the temperature change of the sintering space in order to control the pressure of the sintering space. The exhausting unit includes an exhausting pipe(121) and an opening/closing hole(122). The opening/closing unit is mounted on the exhausting pipe and opens and closes the exhausting pipe. The opening/closing unit is in electric connection with the controller. The opened or closed degree of the exhausting pipe is controlled by the movement of the opening/closing unit using the controller.;COPYRIGHT KIPO 2013