Indium tin oxide (ITO) nano-particles were prepared directly using waste ITO target, which had been coated bymagnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolved in acid, fil-trated, neutralized, manipulated through azeotropic distillation and finally dried, and in this way the precursor of indium tinhydroxide was obtained. The nanosized ITO composite powder was prepared after the precursor heat-treated at 500°C for 2h. TEM images show a narrow distribution of particle size is 5-20 run and the particle size can be controlled. Its granule hasa spherical shape and the dispersion of the particle is well. X-ray diffraction (XRD) patterns indicate the only cubic In2O3phase in the ITO powder heat-treated at 500°C. The purity of ITO composite powder is 99.9907%. The content of indiumwithin filtrate was detected by using the EDTA titration of determination of indium in the ITO powder and ITO target. Ap-propriate amount of SnCl4·5H2O was dissolved in the filtrate, and then ITO powder containing 10 wt.% SnO2 was success-fully prepared by heat-treating.
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