Preparation of indium tin oxide targets with a high density and single phase structure by normal pressure sintering process

摘要

The present work mainly describes the technology for preparing indium-tin oxide (ITO) targets by cold isostatic pressing (CIP) and normal pressure sintering process.ITO powders were produced by chemical co-precipitation and shaped into an ITO green compact with a relative density of 60% by CIP under 300 MPa.Then,an ITO target with a relative density larger than 99.6% was obtained by sintering this green compact at 1550 ℃ for 8 h.The effects of forming pressure,sintering temperature and sintering time on the density of the target were investigated.Also,a discussion was made on the sintering atmosphere.