It is low, low being damage recovery manner of the dielectricity which makes the damage recover which it occurs low in

摘要

PROBLEM TO BE SOLVED: To provide a method for recovering damage to a low dielectric insulating film capable of recovering electrical characteristics of the low dielectric insulating film itself sufficiently while suppressing the oxidation of a buried metal and the occurrence of pattern faults.;SOLUTION: A damaged functional group generated on the surface of the low dielectric insulating film by treatment is substituted with a hydrophobic functional group (ST.2). A damaged component present under a dense layer generated on the surface of the low dielectric insulating film by substitution treatment is recovered by using ultraviolet heating treatment (ST.3).;COPYRIGHT: (C)2009,JPO&INPIT