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Wafer level chip size package for MEMS devices and method for fabricating the same
Wafer level chip size package for MEMS devices and method for fabricating the same
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机译:用于MEMS装置的晶片级芯片尺寸封装及其制造方法
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摘要
The present invention provides a wafer level chip size package having cavities within which micro-machined parts are free to move, allowing access to electrical contacts, and optimized for device performance. Also a method for fabricating a wafer level chip size package for MEMS devices is disclosed. This packaging method provides a well packed device with the size much closely to the original one, making it possible to package the whole wafer at the same time and therefore, saves the cost and cycle time.
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