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Method for manufacturing crystallised silicon and crystallised silicon
Method for manufacturing crystallised silicon and crystallised silicon
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机译:结晶硅的制造方法及结晶硅
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摘要
the invention relates to a method for the manufacture of crystallized silicon according to the efg process using a formgebungsteils, between this and a siliciumschmelze includes crystallized silicon in a ziehzone grows with the siliciumschmelze and / or ziehzone a mong tgas and at least another fluid is supplied.the oxygen levels in the crystallized silicon is increased. in order to increase the oxygen content is accessible without necessarily according to the carbon content increase, it is proposed that a further fluid vapor to the inert gas is
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