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Method for manufacturing crystallised silicon and crystallised silicon

机译:结晶硅的制造方法及结晶硅

摘要

The method for producing crystallized silicon according to an edge-defined film-fed growth process by using molding parts for the production of solar cells, comprises forming a silicon melt (44) of the crystallized silicon between the molding parts in a drawing zone, supplying an inert gas and further fluid to the silicon melt and/or to the drawing zone, increasing the oxygen content in the crystallized silicon by the inert gas and the further fluid and mixing 50-250 ppm of water vapor as further fluid to the inert gas. The method for producing crystallized silicon according to an edge-defined film-fed growth process by using molding parts for the production of solar cells, comprises forming a silicon melt (44) of the crystallized silicon between the molding parts in a drawing zone, supplying an inert gas and further fluid to the silicon melt and/or to the drawing zone, increasing the oxygen content in the crystallized silicon by the inert gas and the further fluid and mixing 50-250 ppm of water vapor as further fluid to the inert gas. The inert gas with a content of oxygen, carbon monoxide and/or carbon dioxide is less than 20 ppm. The content of the water vapor in the inert gas is adjusted and/or regulated by a mass flow analyzer or a moisture-measuring device. The water vapor diffuses a well-known quantity of water in the inert gas over water- and/or water vapor-permeable membrane from a reservoir. Chlorine containing silicon granulates (20) are melted with 10 ppmw of a chlorine content for the formation of the silicon melt. The silicon granulates are used for recharge. The spherically formed granulates are melted with 90% of a ball diameter distribution between 0.8-3 mm. Independent claims are included for: (1) silicon; and (2) wafer cut out from the crystallized silicon.
机译:通过使用用于生产太阳能电池的成型部件,根据边缘限定的膜进料生长工艺来生产结晶硅的方法,该方法包括在拉伸区域中的成型部件之间形成结晶硅的硅熔体(44),惰性气体和通往硅熔体和/或拉制区的其他流体,通过惰性气体和其他流体增加结晶硅中的氧含量,并将50-250 ppm的水蒸气作为另一种流体混合至惰性气体。通过使用用于生产太阳能电池的成型部件,根据边缘限定的膜进料生长工艺来生产结晶硅的方法,该方法包括在拉伸区域中的成型部件之间形成结晶硅的硅熔体(44),惰性气体和通往硅熔体和/或拉制区的其他流体,通过惰性气体和其他流体增加结晶硅中的氧含量,并将50-250 ppm的水蒸气作为另一种流体混合至惰性气体。具有氧,一氧化碳和/或二氧化碳的惰性气体小于20ppm。惰性气体中水蒸气的含量通过质量流量分析仪或水分测量装置来调节和/或调节。水蒸气将惰性气体中已知量的水扩散到来自容器的水和/或水蒸气可渗透的膜上。将含氯的硅颗粒(20)与10 ppmw的氯含量融化以形成硅熔体。硅颗粒用于补给。球形形成的颗粒以0.8-3 mm之间的90%的球直径分布熔化。独立权利要求包括:(1)硅; (2)从结晶硅切出的晶片。

著录项

  • 公开/公告号EP1936012A2

    专利类型

  • 公开/公告日2008-06-25

    原文格式PDF

  • 申请/专利权人 SCHOTT SOLAR GMBH;

    申请/专利号EP20070123423

  • 发明设计人 DR. SEIDL ALBRECHT;DR. SCHWIRTLICH INGO;

    申请日2007-12-18

  • 分类号C30B15/34;C30B29/06;

  • 国家 EP

  • 入库时间 2022-08-21 19:55:44

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