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STACK STRUCTURE COMPRISING EPITAXIAL GRAPHENE, METHOD OF FORMING THE STACK STRUCTURE AND ELECTRONIC DEVICE COMPRISING THE STACK STRUCTURE TO GROW EPITAXIAL GRAPHENE
STACK STRUCTURE COMPRISING EPITAXIAL GRAPHENE, METHOD OF FORMING THE STACK STRUCTURE AND ELECTRONIC DEVICE COMPRISING THE STACK STRUCTURE TO GROW EPITAXIAL GRAPHENE
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机译:包含表观石墨烯的堆叠结构,形成堆叠结构的方法以及构成堆叠结构的电子设备以生长表观石墨烯
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摘要
PURPOSE: A stack structure comprising epitaxial graphene, method of forming the stack structure and electronic device comprising the stack structure are provided to obtain the dual gate structure having the top gate and bottom gate.;CONSTITUTION: The underlying layer is formed on the Si substrate(SUB1). At least one epitaxial graphene(GP1) is included on the underlying layer. The underlying layer is an h- BN(hexagonal boron nitride)(0001) layer. The Ni(111) layer is formed between the Si substrate and underlying layer. The Cu(111) layer is formed between the Si substrate and Ni(111) layer. The Si substrate is the Si(111) substrate or the Si(110) substrate.;COPYRIGHT KIPO 2010
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