Stack structure comprising epitaxial graphene, method of forming the stack structure and electronic device comprising the stack structure

摘要

epitaxial graphene stacked structure comprising (epitaxial graphene) the formation of the layered structure and the way It is described for the electronic device comprising a laminated structure. One embodiment of the stacked structure of the disclosed invention The present invention comprises an Si substrate , an underlayer provided on the Si substrate , and an epitaxial graphene layer provided on at least one of the base layers (epitaxial graphene) the It provides a laminated structure .