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CAPACITOR, FEFET AND FEFET TYPE NON-VOLATILE MEMORY WITH ORDERED FERROELECTIRC PVDF-TRFE THIN FILM BY HIGH THROUGHPUT EPITAXY
CAPACITOR, FEFET AND FEFET TYPE NON-VOLATILE MEMORY WITH ORDERED FERROELECTIRC PVDF-TRFE THIN FILM BY HIGH THROUGHPUT EPITAXY
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机译:有序铁电体PVDF-TRFE薄膜的电容器,FEFET和FEFET型非挥发记忆
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摘要
PURPOSE: A capacitor applying an epitaxial crystal growth PVDF-TrFE thin film, an FeFET and an FeFET type nonvolatile memory are provided to be efficiently used as an array of a ferroelectric capacitor by including a low driving voltage and a high temperature processing ability. CONSTITUTION: A bottom electrode is formed on a substrate. A single crystal PTFE film is formed on the upper side of the lower electrode. An epitaxial growth PVDF-TrFE ferroelectric film is formed on the upper side of the single PTFE film. An upper electrode is formed on the upper side of the epitaxial growth PVDF-TrFE ferroelectric film. The single crystal PTFE film is manufactured by a friction transfer process.
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