? crystallization method of PVDF, and the manufacturing method of capacitors and FeFETs using the ? crystallization method

摘要

PURPOSE: A crystallization method of a PVDF and methods for manufacturing a capacitor and an FeFET using the same are provided to control a crystallization structure of a PVDF by using an embedded structure. CONSTITUTION: PVDF solutions are coated on a substrate. A top layer is formed on the coated PVDF thin film and has a preset pattern. The PVDF thin film is melt over a melting point of the PVDF. The PVDF thin film is re-crystallized by cooling the PVDF thin film.