首页> 外国专利> MANUFACTURING METHOD OF THE SEMICONDUCTOR DEVICE HAVING THE THRESHOLD VOLTAGE ADJUSTING REGION CONTROLLING THE THRESHOLD VOLTAGE DECREASE OF THE MOS TRANSISTOR

MANUFACTURING METHOD OF THE SEMICONDUCTOR DEVICE HAVING THE THRESHOLD VOLTAGE ADJUSTING REGION CONTROLLING THE THRESHOLD VOLTAGE DECREASE OF THE MOS TRANSISTOR

机译:具有阈值电压调整区域以控制MOS晶体管的阈值电压减小的半导体器件的制造方法

摘要

PURPOSE: The manufacturing method of the semiconductor device having the threshold voltage adjusting region forms the threshold voltage adjusting region at the lower part of the gate pattern.;CONSTITUTION: A semiconductor substrate(1) having the element isolation region(15s) limiting the first and second active areas of the different conductive type are prepared. The first mask pattern exposing the fixed region of the first and the second active area is formed. The first threshold voltage adjusting region(45) having the first active region and the other impurity concentration is formed in the fixed region of the first active region.;COPYRIGHT KIPO 2010
机译:目的:具有阈值电压调整区的半导体器件的制造方法在栅极图案的下部形成阈值电压调整区。;组成:具有限制第一区域的元件隔离区(15s)的半导体衬底(1)准备不同导电类型的第二有源区。形成暴露第一有源区域和第二有源区域的固定区域的第一掩模图案。在第一有源区域的固定区域中形成具有第一有源区域和其他杂质浓度的第一阈值电压调节区域(45)。COPYRIGHTKIPO 2010

著录项

  • 公开/公告号KR20100092225A

    专利类型

  • 公开/公告日2010-08-20

    原文格式PDF

  • 申请/专利权人 SAMSUNG ELECTRONICS CO. LTD.;

    申请/专利号KR20090011505

  • 发明设计人 LEE MAENG RYUL;YI SANG BAE;

    申请日2009-02-12

  • 分类号H01L21/336;

  • 国家 KR

  • 入库时间 2022-08-21 18:32:05

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