首页> 外国专利> METHOD OF FORMING THRESHOLD VOLTAGE CONTROL REGION OF SEMICONDUCTOR DEVICE TO MAINTAIN CONSTANTLY THRESHOLD VOLTAGE FROM ENTIRE CHANNEL REGION OF TRANSISTOR

METHOD OF FORMING THRESHOLD VOLTAGE CONTROL REGION OF SEMICONDUCTOR DEVICE TO MAINTAIN CONSTANTLY THRESHOLD VOLTAGE FROM ENTIRE CHANNEL REGION OF TRANSISTOR

机译:形成半导体器件的阈值电压控制区域以从晶体管的整个通道区域保持恒定阈值电压的方法

摘要

Purpose: a kind of method for the starting voltage control zone being used to form semiconductor device is arranged to maintenance same threshold voltage for control a starting voltage by executing first and second ion implantation process in the entire channel region of a transistor. Construction: in order to determine that a region of activation and a field region, a separation layer (18a) are formed in semi-conductive substrate (10) on it. The first ion implantation process for starting voltage control dopant will carry out merely turning on region of activation between separation layer. It is that starting voltage control dopant will carry out forming a starting voltage control zone that one edge region of isolated area, which is partly opened with the second ion implantation process,.
机译:目的:一种用于将起始电压控制区用于形成半导体器件的方法被布置为通过在晶体管的整个沟道区域中执行第一和第二离子注入工艺来维持相同的阈值电压以控制起始电压。构造:为了确定激活区域和场区域,在其上的半导体衬底(10)中形成隔离层(18a)。用于启动电压控制掺杂剂的第一离子注入工艺将仅执行开启隔离层之间的激活区域。正是启动电压控制掺杂剂将形成启动电压控制区,该启动电压控制区是隔离区域的一个边缘区域,该区域在第二离子注入过程中部分打开。

著录项

  • 公开/公告号KR20050003295A

    专利类型

  • 公开/公告日2005-01-10

    原文格式PDF

  • 申请/专利权人 HYNIX SEMICONDUCTOR INC.;

    申请/专利号KR20030044015

  • 发明设计人 KANG DAE IN;

    申请日2003-06-30

  • 分类号H01L21/265;

  • 国家 KR

  • 入库时间 2022-08-21 22:06:03

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