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VACUUM FILM FORMING APPARATUS AND METHOD FOR DETECTING POSITION OF SHUTTER PLATE OF VACUUM FILM FORMING APPARATUS
VACUUM FILM FORMING APPARATUS AND METHOD FOR DETECTING POSITION OF SHUTTER PLATE OF VACUUM FILM FORMING APPARATUS
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机译:真空成膜设备和检测真空成膜设备的闸板位置的方法
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摘要
At the time of detecting the position of a shutter plate (21), a laser beam (L), for instance, is radiated from a detector (optical sensor) (24). The radiated laser beam (L) reaches the shutter plate (21) through the window (25) of a chamber (1). Then, the laser beam is reflected by the surface of the shutter plate (21) and re-enters the detector (24). The detector (24) detects the time required from the output of the laser beam (L) to the entry of the reflected beam.
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