Study on the Performance of Measurement Apparatus for Vacuum Material Outgassing Rates

摘要

A measurement apparatus for vacuum material outgassing rates was developed, which was mainly composed of four systems, including pumping system, switching between two pumping paths(SPP) measurement system, constant volume measurement system, bake heating and light irradiation heating system. The ultimate pressure, 10~(-9)Pa, was thus obtained in the UHV chamber by combining the magnetically levitated turbo pump with mechanical pump. The test principles of constant volume method and SPP method were described, and several vacuum material outgassing rates such as copper were tested at room temperature. The lower measurement limiting value of apparatus can be extended to 10~(-12) Pam~3s~(-1)cm~(-2).