Vacuum film forming apparatus and method for detecting position of shutter plate of vacuum film forming apparatus

摘要

in the position detection of the shutter plate 21 , for example from the detector ( photosensor ) 24 g., a laser beam (L). The irradiated laser light (L) is reached, the shutter plate 21 via the window 25 of the chamber 1 . And , it is reflected from the surface of the shutter plate 21 is again incident on the detector 24 . The detector 24 detects the amount of time of the reflected light incident from the emission of the laser light (L). ;