VACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHUTTER PLATE OF VACUUM FILM-FORMING APPARATUS

摘要

ABSTRACTVACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHUTTER PLATE OF VACUUM FILM-FORMING APPARATUSAt the time of detecting a position of a shutter plate (21), a laser light (L), for instance, is radiated from a detector (an optical sensor) (24). The radiated laser light (L) reaches the shutter plate (21) through a window (25) of a chamber (1). Then, the laser light is reflected by the surface of the shutter plate (21) and re-enters the detector (24).The detector (24) detects the time required from the emission of the laser light (L) to the entry of the reflected light.Figure 3