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VACUUM FILM FORMING APPARATUS AND METHOD FOR DETECTING POSITION OF SHUTTER PLATE OF VACUUM FILM FORMING APPARATUS
VACUUM FILM FORMING APPARATUS AND METHOD FOR DETECTING POSITION OF SHUTTER PLATE OF VACUUM FILM FORMING APPARATUS
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机译:真空成膜设备和检测真空成膜设备的闸板位置的方法
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摘要
At the time of detecting a position of a shutter plate, a laser light, for instance, is radiated from a detector (an optical sensor). The radiated laser light reaches the shutter plate through a window of a chamber. Then, the laser light is reflected by the surface of the shutter plate and re-enters the detector. The detector detects the time required from the emission of the laser light to the entry of the reflected light.
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