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LIQUID CRYSTAL DISPLAY DEVICE HAVING ESD PROTECTION CIRCUIT AND METHOD FOR MANUFACTURING THE SAME
LIQUID CRYSTAL DISPLAY DEVICE HAVING ESD PROTECTION CIRCUIT AND METHOD FOR MANUFACTURING THE SAME
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机译:具有ESD保护电路的液晶显示装置及其制造方法
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摘要
source electrode and a drain electrode on the silicon oxide film 31, each of which the ITO film 32, a transparent electrode , has the metal film 33 formed on the ITO film 32 . Without any source electrode and a drain electrode region, the gap 35 is formed between the source electrode and the drain electrode. Silicon nitride film 34 ( gate insulating film) is formed on the source electrode and the drain electrode and the gap (35) . Silicon nitride film 34 has a relatively large first region having a thickness (D 1 ) and a second region with a relatively small thickness (D 2 ). Region of the silicon nitride film (34) (D 2 ) is provided with a MIM structure . Gate bus layer 36 is formed on the silicon nitride film 34 . MIM structure is formed in the second regions (D 2 ).
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