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WRAP-AROUND CONTACTS FOR FINFET AND TRI-GATE DEVICES
WRAP-AROUND CONTACTS FOR FINFET AND TRI-GATE DEVICES
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机译:FINFET和三栅极器件的绕线接触
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摘要
A semiconductor device comprises a substrate and a semiconductor body formed on the substrate. The semiconductor body comprises a source region; and a drain region. The source region or the drain region, or combinations thereof, comprises a first side surface, a second side surface, and a top surface. The first side surface is opposite the second side surface, the top surface is opposite the bottom surface. The source region or the drain region, or combinations thereof, comprise a metal layer formed on the substantially all of the first side surface, substantially all of the second side surface, and the top surface.
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