首页>
外国专利>
Epitaxial baseplate for semiconductor device, leakage current control method of Schottky junction structure, and Schottky junction structure
Epitaxial baseplate for semiconductor device, leakage current control method of Schottky junction structure, and Schottky junction structure
展开▼
机译:半导体器件的外延基板,肖特基结结构的漏电流控制方法以及肖特基结结构
展开▼
页面导航
摘要
著录项
相似文献
摘要
Provided is an epitaxial substrate (10) for semiconductor device that is capable of achieving a semiconductor device having high reliability in reverse characteristics of schottky junction. An epitaxial substrate (10) for semiconductor device obtained by forming and ON a base substrate (1), a group of group III nitride layers by lamination such that a (0001) crystal plane of each layer is approximately parallel to a substrate surface includes: a channel layer (3) formed of a first group III nitride having a composition of In x1 Al y1 Ga z1 N (x1+y1+z1=1 and z1 0); and a barrier layer (5) formed of a second group III nitride having a composition of In x2 Al y2 N (x2+y2=1 and x2 0, y2 0), wherein the second group III nitride is a short-range-ordered mixed crystal having a short-range order parameter satisfying a range where 0 1.
展开▼
机译:提供一种用于半导体器件的外延衬底(10),其能够获得在肖特基结的反向特性方面具有高可靠性的半导体器件。通过在基底基板(1)上形成并在其上形成一组III族氮化物层以使每一层的(0001)晶面大致平行于基板表面的方式获得的用于半导体器件的外延基板(10)包括:沟道层(3),其由具有In x1 Al y1 Ga z1 N(x1 + y1 + z1 = 1且z1> 0)的第一III族氮化物形成;以及由具有In x2 Al y2 N(x2 + y2 = 1并且x2> 0,y2> 0)组成的第二III族氮化物形成的阻挡层(5),其中第二III族氮化物是短程的短程参数满足0 << 1的范围的有序混合晶体。
展开▼