首页>
外国专利>
Multivariable solver for optical proximity correction
Multivariable solver for optical proximity correction
展开▼
机译:用于光学邻近校正的多变量求解器
展开▼
页面导航
摘要
著录项
相似文献
摘要
The method of the invention tracks how the collective movement of edge segments in a mask layout alters the resist image values at control points in the layout and simultaneously determines a correction amount for each edge segment in the layout. A multisolver matrix that represents the collective effect of movements of each edge segment in the mask layout is used to simultaneously determine the correction amount for each edge segment in the mask layout.
展开▼