The electrostatic comb Drive accelerograph outside comb Drive

摘要

PROBLEM TO BE SOLVED: To provide a bidirectional, out-of-plane electrostatic comb drive apparatus, including two sets of stator comb tines, in order to improve the linearity and the response range.;SOLUTION: An electrically-independent first set (132) of stator comb tines is offset from a second set (136) of stator comb tines. A set of rotor comb tines (124) interleaves with both sets of stator comb tines. A first voltage applied to the first set of stator comb tines operates to pull the rotor comb tines toward the first set of stator comb tines. A second voltage applied to the second set of stator comb tines operates to pull the rotor comb tines toward the second set of stator comb tines, enabling bidirectional operation. A fabrication method is disclosed that enables fabrication of the first set and the second set of stator tines that are mechanically and electrically independent and that are interleaved by the rotor comb tines.;COPYRIGHT: (C)2011,JPO&INPIT