Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators

摘要

A new comb finger design which enhances the operational performance of the commonly used electrostatic comb-drive actuator is presented. The angled comb finger design is discussed and shown experimentally to produce a greater actuating force than conventional rectangular comb fingers. Displacements up to twice as large as that achieved using rectangular comb fingers are shown for the same applied voltage.