ELECTROSTATIC COMB DRIVE ACTUATOR, AND OPTICAL CONTROLLER USING THE ELECTROSTATIC COMB DRIVE ACTUATOR

摘要

An electrostatic comb drive actuator, characterized in that plural outersuspended elastic beams 2a and 2b are disposed in parallel to and outsideplural innersuspended elastic beams 1a and 1b disposed in parallel to each other; the endsof theinner suspended elastic beams and the outer suspended elastic beams on bothsides areconnected with end connecting beams 3a and 3b; the outer suspended elasticbeams aresupported at their centers on a board 5; the inner suspended elastic beams areconnectedwith each other at their centers by means of a working section 6; a movablecombelectrode 7 is supported on the working section; and a fixed comb electrode 8issupported on the board.