Numerical Simulation on the Comb Drive Micro-Accelerometer

摘要

In this study, we research about comb-drive micro-structure, which is a MEMS device used to measure velocities and accelerations. To ensure the accuracy and visualization of the result, we simulate the dynamics of the comb drive?using COMSOL Multiphysics, meanwhile introducing the concept of re-meshing.?We aim to find the optimal comb-drive-building material, which can provide the device with the most desirable first eigenfrequency. According to the optimization process, silver is the most suitable construction material. Afterwards, the electric responses of both the optimized device and the pre-optimized one are analyzed in frequency domain and stationary study. We conclude that the capacitance change is positively related to frequency in a linear manner, and that the optimized device has a larger increment of both displacement and capacitance per unit of frequency change than the pre-optimized one, showing that the optimization of material realizes our goal of enhancing electrical performance.