Template chuck imprint apparatus, and a pattern forming method

摘要

PROBLEM TO BE SOLVED: To provide a template chuck, an imprint device, and a pattern formation method which can control to hold and modify templates of various thickness, materials, and shapes.;SOLUTION: A template chuck 111 for an imprint device comprises: first and second structures 401 and 402 to contact the upper and lower surfaces of a template 101 to grasp the template both from above and below; multiple contact members 403 to contact the side face of the template to grasp the template from the side face direction; a modification control device 404 to modify the template by adding stress to the template through the multiple contact members. Further, the first structure, the second structure, and the multiple contact members are configured to be driven individually.;COPYRIGHT: (C)2012,JPO&INPIT