SOURCE/DRAIN EXTENSION CONTROL FOR ADVANCED TRANSISTORS

摘要

A planar transistor with improved performance has a source and a drain on a semiconductor substrate that includes a substantially undoped channel extending between the source and the drain. A gate is positioned over the substantially undoped channel on the substrate. Implanted source/drain extensions contact the source and the drain, with the implanted source/drain extensions having a dopant concentration of less than about 1×10¹⁹ atoms/cm³, or alternatively, less than one-quarter the dopant concentration of the source and the drain.