MANUFACTURING METHOD OF SILICON CARBIDE-COATED GRAPHITE MEMBER, SILICON CARBIDE COATED GRAPHITE MEMBER, AND MANUFACTURING METHOD OF SILICON CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a silicon carbide-coated graphite member in which life of a graphite component is significantly increased by effectively suppressing conversion of the graphite component used in a silicon crystal manufacturing apparatus and the like into an SiC layer.;SOLUTION: There is provided a manufacturing method of a silicon carbide-coated graphite member 5 in which by coating and impregnating 3 silicone oil into a graphite component 2 on a surface of which an SiC layer 1 is formed and firing the component, the SiC layer is densified 4. After the component is air-dried or heated and dried at temperature of 100°C or lower after coating and impregnating 3 the silicone oil, the firing is performed at the highest firing temperature of 1,500°C or higher through one stage or more of heating steps in an inert gas atmosphere.;COPYRIGHT: (C)2015,JPO&INPIT