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SEMICONDUCTOR DEVICE HAVING BURIED CHANNEL ARRAY AND METHOD OF MANUFACTURING THE SAME
SEMICONDUCTOR DEVICE HAVING BURIED CHANNEL ARRAY AND METHOD OF MANUFACTURING THE SAME
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机译:具有隐蔽通道阵列的半导体装置及其制造方法
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摘要
A semiconductor device and a method of fabricating a semiconductor device, the device including an active region on a substrate, the active region being defined by a field region; gate trenches in the active region of the substrate; gate structures respectively formed in the gate trenches; and at least one carrier barrier layer in the substrate and under the gate trenches.
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