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Manufacturing methods for high density micro-channel arrays

机译:高密度微通道阵列的制造方法

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摘要

This thesis explores two distinct methods of micro-array manufacture for high throughput pharmaceutical scanning. The first method, impact shaping of polymers, is a novel, inexpensive way to form large numbers of small channels or wells in plastics. The impact method uses the kinetic energy from a ram to punch holes into a polymer sample without melting the bulk of the workpiece. The second method is electrical discharge machining (EDM) of silicon, which machines high aspect ratio holes arranged in high density arrays on silicon wafers. The method may be viewed as complementary to current plasma etching techniques and lithography. Several testing platforms were devised for the creation of the plastic well arrays based on the high speed ram principle. A modified Charmilles Roboform 30 machine was used to create the silicon arrays. While creating high volume manufacturing methods for will required additional work, both processes were fundamentally successful, producing individual arrays of acceptable quality. Both methods hold promise for manufacture of accurate, inexpensive, and useful replacements for current plate technology.
机译:本文探讨了用于高通量药物扫描的两种不同的微阵列制造方法。第一种方法是聚合物的冲击成形,是一种新颖,廉价的方法,可以在塑料中形成大量的小通道或孔。冲击法利用来自撞锤的动能在聚合物样品上打孔而不熔化大部分工件。第二种方法是硅的放电加工(EDM),它加工以高密度阵列排列在硅晶片上的高纵横比孔。该方法可以被视为对当前的等离子体蚀刻技术和光刻的补充。设计了多个测试平台,用于基于高速冲压原理创建塑料井阵列。使用改良的Charmilles Roboform 30机器创建硅阵列。在为需要额外工作而创建大批量制造方法的同时,这两个过程从根本上都是成功的,生产出质量合格的单个阵列。两种方法都有望为当前的印版技术制造准确,廉价和有用的替代品。

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